XML
SEMI
The modern industry standard for wafer map data exchange.
ReadWrite
Full guideBack to MAPx
Format reference
Wafer map formats
Native support for industry-standard semiconductor wafer map formats. No third-party converters needed.
Text
Wafer inspection systems
Industry-standard format for wafer inspection and defect data.
ReadWrite
Full guideText
Industry Standard
Widely adopted text-based wafer map format with broad legacy support.
ReadWrite
Full guideBinary
Prober and handler equipment
Native format for prober and handler equipment.
ReadWrite
Full guideBinary
Wafer inspection systems
Binary inspection format from automated wafer inspection systems.
Read
Full guideText
Generic
Lightweight coordinate-based wafer map format for data exchange.
ReadWrite
Full guideBinary
ATE industry standard
The binary datalog every wafer sort tester writes.
Read
Full guideMAPx handles all of these formats natively
No converters needed. Upload your own files and analyze them in the free trial.