All formats
Format guide
SEMI E142
The modern industry standard for wafer map data exchange.
XMLSEMI E142 Wafer Map Data Format
What it is
SEMI E142 is the latest wafer map exchange standard developed by SEMI (Semiconductor Equipment and Materials International). It provides a comprehensive, structured format for representing substrate mapping data across the semiconductor manufacturing ecosystem.
Why it matters
- Industry standard endorsed by SEMI
- Adopted by leading MES and yield-management platforms
- Supports complete lot, wafer, and die-level data
- XML-based for broad tooling compatibility
- Designed for fab-to-fab and fab-to-OSAT data exchange