All formats
Format guide
TFF
Binary inspection format from automated wafer inspection systems.
BinaryTencor Review File Format
What it is
TFF is a binary defect inspection format generated by automated wafer inspection systems. It carries high-resolution defect location data used in yield analysis and process control.
Why it matters
- Output from automated optical inspection tools
- High-resolution defect coordinate data
- Used in advanced yield management workflows
- Binary format for efficient large-dataset handling
- Critical for inspection-driven process control