All formats
Format guide
KLARF
Industry-standard format for wafer inspection and defect data.
TextKLA Results File
What it is
KLARF is the standard output format from automated wafer inspection and review equipment. It is widely used across semiconductor fabs for defect inspection results, carrying spatial defect data alongside wafer and lot context.
Why it matters
- Standard output from automated inspection tools
- Widely adopted across global semiconductor fabs
- Captures defect classification and location data
- Supported by major yield management systems
- Essential for defect-driven yield analysis workflows